Comparative Study About the Structural Properties of ZnO Films Grown on Si, GaAs, And Al2O3 Substrates and a GaN TemplateT.S. Jang, S.M. Lee, K.B. Kim and D.C. OhMATEC Web Conf., 78 (2016) 01107DOI: https://doi.org/10.1051/matecconf/20167801107