Effect of Sputtering Pressure on the Properties of Boron and Gallium Co-doped ZnO Thin FilmsMengfei Chen, Jian Huang, Jin Yang, Ke Tang, Yuanxi Lu and Linjun WangMATEC Web Conf., 67 (2016) 06073DOI: https://doi.org/10.1051/matecconf/20166706073