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Effect of Nitrogen Flow Rate on Structure and Adhesion Strength of Magnetron Sputtered Ti-Si-N Nanocomposite Films

Chunlin He, Leipeng Xie, Yuechang Zhu, Rui Li, Guofeng Ma and Jianming Wang

MATEC Web Conf., 67 (2016) 04015

DOI: https://doi.org/10.1051/matecconf/20166704015

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