Structural and Morphological Characteristics of Inxga1-xN Films Grown on SI (111) by Reactive Magnetron SputteringXuewen Wang, Lin He, Xiaoqing Li, Xingxing Su, Zhiyong Zhang and Wu ZhaoMATEC Web Conf., 67 (2016) 04013DOI: https://doi.org/10.1051/matecconf/20166704013