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Hybrid chemical etching of femtosecond irradiated 3D structures in fused silica glass

Sara Lo Turco, Roberto Osellame, Roberta Ramponi and Krishna Chaitanya Vishnubhatla

MATEC Web of Conferences, 8 (2013) 05009

DOI: https://doi.org/10.1051/matecconf/20130805009

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