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DOI: 10.1088/1361-6501/ab1495
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A robust SEM auto-focus algorithm using multiple band-pass filters

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Measurement Science and Technology 28 (1) 015403 (2017)
DOI: 10.1088/1361-6501/28/1/015403
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Numerical Modeling and Experimental Investigation of the Breadboard Model of a Near-Field Interference Microscope

Victor Belichenko, Andrey Zapasnoy, Aleksandr Mironchev, A.V. Yurchenko and V.I. Syryamkin
MATEC Web of Conferences 79 01016 (2016)
DOI: 10.1051/matecconf/20167901016
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