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Cited article:

Closed-Loop Autofocus Scheme for Scanning Electron Microscope

Le Cui, Naresh Marturi, Eric Marchand, Sounkalo Dembélé, Nadine Piat

MATEC Web of Conferences, 32 (2015) 05003

Published online: 2015-12-02

DOI: https://doi.org/10.1051/matecconf/20153205003

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A robust SEM auto-focus algorithm using multiple band-pass filters

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Numerical Modeling and Experimental Investigation of the Breadboard Model of a Near-Field Interference Microscope

Victor Belichenko, Andrey Zapasnoy, Aleksandr Mironchev, A.V. Yurchenko and V.I. Syryamkin
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