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Cited article:

Numerical simulation of the oxygen distribution in silicon melt for different argon gas flow rates during Czochralski silicon crystal growth process

Zumrotul Ida, Jyh-Chen Chen, Thi Hoai Thu Nguyen

MATEC Web Conf., 204 (2018) 05013

Published online: 2018-09-21

DOI: https://doi.org/10.1051/matecconf/201820405013

This article has been cited by the following article(s):

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Growth chamber gas dynamics in Cz silicon single crystal growth process

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Influence of Argon Gas Flow Rate on Oxygen and Carbon Impurities Concentration in Multicrystalline Silicon Grown by Directional Solidification Furnace: Numerical and Experimental Investigation

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