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Hydrothermal Engineering of Ferroelectric PZT Thin Films Tailoring Electrical and Ferroelectric Properties via TiO2 and SrTiO3 Interlayers for Advanced MEMS
A comprehensive performance comparison of linear quadratic regulator (LQR) controller, model predictive controller (MPC), $$H_{\infty }$$ loop shaping and $$\mu $$-synthesis on spatial compliant link-manipulators