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Cited article:

Structural Design and Analysis of a Quasi-Abbé-Error Free Three-Axis Wafer Measuring Platform

Yi-Yuan Lu, Hsi-Hui Lin, Hao-Jun Li and Liang-Chia Chen
International Journal of Automation Technology 19 (6) 1026 (2025)
https://doi.org/10.20965/ijat.2025.p1026