MATEC Web of Conferences

Non-stationary volume-adsorption model for pumping of vacuum chambers

Leonid Rozanov and Aleksandr Kirillov

MATEC Web Conf., 245 (2018) 04007

Published online: 05 December 2018

DOI: 10.1051/matecconf/201824504007

Leonid Rozanov

Aleksandr Kirillov

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