MATEC Web of Conferences

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Yalin Wang and Yongjun Yang

MATEC Web Conf., 160 (2018) 05008

Published online: 09 April 2018

DOI: 10.1051/matecconf/201816005008

Yalin Wang

Yongjun Yang

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)