MATEC Web of Conferences

A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

Xiaobo Zhu, Zhijie Wen and Pinkuan Liu

MATEC Web Conf., 77 (2016) 01040

Published online: 03 October 2016

DOI: 10.1051/matecconf/20167701040

Xiaobo Zhu

Zhijie Wen

Pinkuan Liu

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