MATEC Web of Conferences

Multiphysics & Parallel Kinematics Modeling of a 3DOF MEMS Mirror

N. Mamat, K. Rabenorosoa, C. Clévy, P. Lutz and H. Xie

MATEC Web of Conferences, 32 (2015) 01004

Published online: 02 December 2015

DOI: 10.1051/matecconf/20153201004

N. Mamat

K. Rabenorosoa

C. Clévy

P. Lutz

H. Xie

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