MATEC Web of Conferences

Vacuum methods of surface treatment with subnanometer roughness

Yury Panfilov and Leonid Kolesnik

MATEC Web Conf., 224 (2018) 01117

Published online: 30 October 2018

DOI: 10.1051/matecconf/201822401117

Yury Panfilov

Leonid Kolesnik

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