MATEC Web of Conferences

The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer Surface

Dong Zhong, Zhong Ming Li, Chun Chen and Ruo Lin Ruan

MATEC Web Conf., 63 (2016) 01019

Published online: 12 July 2016

DOI: 10.1051/matecconf/20166301019

Dong Zhong

Zhong Ming Li

Chun Chen

Ruo Lin Ruan

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