Practical Reuse of Activated Carbon in the Exhaust Facility of Semiconductor Production Factory with Supercritical Carbon Dioxide RegenerationYasuyuki Ito, Ikuo Ushiki, Yoshiyuki Sato and Hiroshi InomataMATEC Web Conf., 333 (2021) 08004DOI: https://doi.org/10.1051/matecconf/202133308004