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Piezoelectric Response Evaluation of ZnO Thin Film Prepared by RF Magnetron Sputtering

Da-Long Cheng, Kuo-Sheng Kao, Chia-Hua Liang, Yu-Che Wang, Yu-Chieh Chen, Wei-Che Shih and Leong-Perng Chan

MATEC Web Conf., 109 (2017) 04001

DOI: https://doi.org/10.1051/matecconf/201710904001

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