The Acoustic Characteristic Investigation of Micro Plasma Shock Wave Obtained by Femtosecond Laser Ablation of Silicon Wafer SurfaceDong Zhong, Zhong Ming Li, Chun Chen and Ruo Lin RuanMATEC Web Conf., 63 (2016) 01019DOI: https://doi.org/10.1051/matecconf/20166301019