EDP Sciences logo
Web of Conferences logo
Search
Menu
Article citations

Download citation

Multiphysics & Parallel Kinematics Modeling of a 3DOF MEMS Mirror

N. Mamat, K. Rabenorosoa, C. Clévy, P. Lutz and H. Xie
MATEC Web of Conferences, 32 (2015) 01004
DOI: https://doi.org/10.1051/matecconf/20153201004


Back to the article