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Cited article:
Nikolay Samotaev, Konstantin Oblov, Anastasia Ivanova
MATEC Web Conf., 207 (2018) 04003
Published online: 2018-09-18
This article has been cited by the following article(s):
Thin Platinum Films Topology Formation on Ceramic Membranes
Nikolay Samotaev, Konstantin Oblov, Maya Etrekova, Anastasia Ivanova, Denis Veselov and Anastasiya Gorshkova
Materials Science Forum 977 272 (2020)
DOI: 10.4028/www.scientific.net/MSF.977.272
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Improvement of Field Effect Capacity Type Gas Sensor Thermo Inertial Parameters by Using Laser Micromilling Technique
Nikolay Samotaev, Konstantin Oblov, Maya Etrekova, Denis Veselov, Anastasia Ivanova and Artur Litvinov
Materials Science Forum 977 256 (2020)
DOI: 10.4028/www.scientific.net/MSF.977.256
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Ceramic packages prototyping for electronic components by using laser micromilling technology
Nikolay N. Samotaev, Konstantin Yu Oblov, Anastasia V. Gorshkova, Anastasia V. Ivanova and Dmitriy V. Philipchuk
Journal of Physics: Conference Series 1686 (1) 012010 (2020)
DOI: 10.1088/1742-6596/1686/1/012010
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Ceramic microhotplates for low power metal oxide gas sensors
Nikolay Samotaev, Konstantin Oblov, Anastasiya Gorshkova, Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Nikolai Trofimenko, Mihails Kusnezoff, Franz-Marin Fuchs and Lena Wissmeier
Materials Today: Proceedings 30 448 (2020)
DOI: 10.1016/j.matpr.2019.12.394
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N. Samotaev, K. Oblov, A. Ivanova, A. Gorshkova and B. Podlepetsky
157 (2019)
DOI: 10.1109/MIEL.2019.8889576
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Laser Micromilling Technology as a Key for Rapid Ceramic MEMS Devices
K. Yu. Oblov, N. N. Samotaev, M. O. Etrekova and A. V. Gorshkova
Physics of Atomic Nuclei 82 (11) 1508 (2019)
DOI: 10.1134/S1063778819110152
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Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology
Nikolay Samotaev, Konstantin Oblov, Maya Etrekova, Denis Veselov and Anastasiya Gorshkova
Materials Science Forum 977 238 (2020)
DOI: 10.4028/www.scientific.net/MSF.977.238
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