The Citing articles tool gives a list of articles citing the current article. The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
Machine learning-based techniques for fault diagnosis in the semiconductor manufacturing process: a comparative study
Abubakar Abdussalam Nuhu, Qasim Zeeshan, Babak Safaei and Muhammad Atif Shahzad The Journal of Supercomputing 79(2) 2031 (2023) https://doi.org/10.1007/s11227-022-04730-x
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes
Min Yong Lee, Yeoung Je Choi, Gyeong Taek Lee, Jongkwan Choi and Chang Ouk Kim IEEE Transactions on Semiconductor Manufacturing 35(2) 282 (2022) https://doi.org/10.1109/TSM.2022.3156600
Managing and Implementing the Digital Transformation
Baris Ördek, Yuri Borgianni and Eric Coatanea Lecture Notes in Networks and Systems, Managing and Implementing the Digital Transformation 525 61 (2022) https://doi.org/10.1007/978-3-031-14317-5_6
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes
Dae Woong An, Seung Kim, Hyun Kyu Kim and Chang Ouk Kim IEEE Transactions on Semiconductor Manufacturing 35(4) 596 (2022) https://doi.org/10.1109/TSM.2022.3201654
Data-driven Analysis of Product Property Propagation to Support Process-integrated Quality Management in Manufacturing Systems
Virtual Quality Gates in Manufacturing Systems: Framework, Implementation and Potential
Marc-André Filz, Sebastian Gellrich, Artem Turetskyy, Jacob Wessel, Christoph Herrmann and Sebastian Thiede Journal of Manufacturing and Materials Processing 4(4) 106 (2020) https://doi.org/10.3390/jmmp4040106
Early Defect Detection Using Clustering Algorithms