Processing of Graphene combining Optical Detection and Scanning Probe Lithography
Division Microrobotics and Control Engineering, University of Oldenburg, D-26129 Oldenburg, Germany
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This paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected graphene flakes can be modified using a scanning probe based lithographical process that is directly linked to the in-situ optical images. The results of this process are discussed with respect to further application scenarios.
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