Fabrication of Topologically-Complex 3D Microstructures by Femtosecond Laser Machining and Polymer Molding
Eindhoven University of Technology, PO Box 513, 5600 MB, Eindhoven, The Netherlands
We demonstrate the demolding of topologically complex three-dimensional elastomeric microstructures from a femtosecond laser micromachined glass substrate. Demolding success rates of >90% are achieved, which are qualitatively supported by a simple mechanical model.
OCIS codes: (220.4000) – Microstructure fabrication / (220.4610) – Optical fabrication
© Owned by the authors, published by EDP Sciences, 2013
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