Digital photonic production of 3D micro fluidics in glass by high speed micro scanner
1 Lehrstuhl für Lasertechnik, RWTH Aachen University, Steinbachstraße 15, 52074, Aachen Germany
2 LightFab (in the course of incorporation), Steinbachstraße 15, 52074, Aachen Germany
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Digital photonic production of 3D microfluidic devices and assembled micro mechanicsinside fused silica glass is carried out using In-volume Selective Laser-induced Etching (ISLE).From CAD data of digital 3D objects the trajectories of the laser focus are automatically generated. The CAM software has been developed controlling different fs- and ps-lasers, the beam deflection systems and the translation stages to produce the structures automatically.
© Owned by the authors, published by EDP Sciences, 2013
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