Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass
1 State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China
2 Laser Technology Laboratory, RIKEN - Advanced Science Institute, Hirosawa 2-1, Wako, Saitama 351-0198, Japan
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In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.
© Owned by the authors, published by EDP Sciences, 2013
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