Parallel femtosecond laser processing with vector-wave control
Center for Optical Research and Education (CORE), Utsunomiya University, Japan
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Parallel femtosecond laser processing with a computer-generated hologram displayed on a spatial light modulator, has the advantages of high throughput and high energy-use efficiency. for further increase of the processing efficiency, we demonstrated parallel femtosecond laser processing with vector-wave control that is based on polarization control using a pair of spatial light modulators.
© Owned by the authors, published by EDP Sciences, 2013
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