Dynamics of a Micro Electrical Mechanical System Subject to Thermoelastic and Squeeze-Film Damping
1 DICEA, Polytechnic University of Marche, 60131 Ancona, Italy
2 DIISM, Polytechnic University of Marche, 60131 Ancona, Italy
The static and the dynamic behaviours of a MEMS subjected to thermoelastic and squeeze film effects have been investigated. Major attention is initially devoted to the modeling of this multi-physics system, including mechanical, electrical, thermoelastic and fluid dynamics behaviours, and their couplings. Then, static solutions have been obtained numerically by a finite-difference technique. Finally, an analysis of the vibrations is performed, and the complex natural frequencies are determined. The real part is related to the oscillatory behaviour, while the imaginary part provides the overall damping of the system.
© Owned by the authors, published by EDP Sciences, 2012